표 3. | Table 3. 측정된 root-mean-square 조도값(R
q
)의 평균과 유효 전기전도도 | Measured results of the slow-wave structure waveguide dimensions and effective conductivity.
Materials
Avg. value (
μ
m)
σ
eff
/IACS (%)
CL80CU
15.08
3.75
AlSi10Mg
29.35
11.00
CuCP
36.01
25.00