표 2. | Table 2. Capacitance matrix 결과 비교(단위: fF/m) | Comparison of capacitance matrix result.
C
11
'
C
22
'
C
33
'
In-house
1.92
0.736
0.736
Q3D
[17]
1.863
0.704
0.704
Error (%)
3.06
4.546
4.546
C
12
'
=
C
21
'
C
13
'
=
C
31
'
C
23
'
=
C
32
'
In-house
−0.199
−0.199
−0.282
Q3D
[17]
−0.193
−0.193
−0.266
Error (%)
3.109
3.109
6.015