표 2. | Table 2. Capacitance matrix 결과 비교(단위: fF/m) | Comparison of capacitance matrix result.

C 11 ' C 22 ' C 33 '
In-house 1.92 0.736 0.736
Q3D[17] 1.863 0.704 0.704
Error (%) 3.06 4.546 4.546
C 12 ' = C 21 ' C 13 ' = C 31 ' C 23 ' = C 32 '
In-house −0.199 −0.199 −0.282
Q3D[17] −0.193 −0.193 −0.266
Error (%) 3.109 3.109 6.015