표 2. | Table 2. Capacitance matrix 결과 비교(단위: fF/m) | Comparison of capacitance matrix result.

	C 11 '	C 22 '	C 33 '
In-house	1.92	0.736	0.736
Q3D[17]	1.863	0.704	0.704
Error (%)	3.06	4.546	4.546
	C 12 '   =   C 21 '	C 13 '   =   C 31 '	C 23 '   =   C 32 '
In-house	−0.199	−0.199	−0.282
Q3D[17]	−0.193	−0.193	−0.266
Error (%)	3.109	3.109	6.015