표 2. | Table 2. Capacitance matrix 결과 비교(단위: fF/m) | Comparison of capacitance matrix result.

C 11 ' C 22 ' C 33 '
In-house 167.524 173.637 167.524
Q3D[17] 165.514 171.374 165.628
Error (%) 3.06 4.546 4.546
C 12 ' = C 21 ' C 13 ' = C 31 ' C 23 ' = C 32 '
In-house −29.19 −0.435 −29.19
Q3D[17] −28.38 −0.431 −28.219
Error (%) 3.109 3.109 6.015