표 2. | Table 2. Capacitance matrix 결과 비교(단위: fF/m) | Comparison of capacitance matrix result.
C
11
'
C
22
'
C
33
'
In-house
167.524
173.637
167.524
Q3D
[17]
165.514
171.374
165.628
Error (%)
3.06
4.546
4.546
C
12
'
=
C
21
'
C
13
'
=
C
31
'
C
23
'
=
C
32
'
In-house
−29.19
−0.435
−29.19
Q3D
[17]
−28.38
−0.431
−28.219
Error (%)
3.109
3.109
6.015