표 1. | Table 1. Capacitance matrix 결과 비교 (단위: pF/m) | Comparison of capacitance matrix result.

	C 11 '	C 22 '	C 33 '
In-house	167.524	173.637	167.524
Q3D[17](2D extractor)	165.514	171.374	165.628
Rel. error (%)	1.214	1.321	1.145
	C 12 '   =   C 21 '	C 13 '   =   C 31 '	C 23 '   =   C 32 '
In-house	−29.19	−0.435	−29.19
Q3D[17](2D extractor)	−28.38	−0.431	−28.219
Rel. error (%)	2.854	0.928	3.441