표 1. | Table 1. 제작된 MOM 캐패시터의 성능비교 | Performance comparison of the fabricated MOM capacitors.

Structure	Used Layer	Area [um2]	Capacitance [fF]	Capacitance density [fF/um2]	Q-factor (@10 GHz)	SRF [GHz]
HPP-1	LB-32	196	39	0.2	6.9	>120
HPP-2	LB-M4	196	127	0.64	2.4	69
HPP-3	LB-M2	625	480	0.76	0.6	17
VPP	EA-M2	225	62	0.27	5.1	71
PWr	EA-M2	225	200	0.88	1.3	37.5