표 1. | Table 1. 서브 테라헤르츠 CMOS 온칩 안테나 성능 비교 | Performance comparison of sub-terahertz on-chip antennas in CMOS.

	Ref [8]	Ref [9]	Ref [10]	This work
Configuration	Slotted loop	Substrate in waveguide	Planar dipole	Microstrip patch
Frequency(GHz)	240	460	540	407
Efficiency(%)	14	29.1	28	17
Gain(dBi)	1.5	0.09	1.33	−3.6
Technology	65 nm	65 nm	40 nm	45 nm